.

0 (hodnocen0 x )

BK

Brno : Masarykova univerzita, c1991

83 s.

ISBN 80-210-0353-7 ISBN !80-210-353-7 (chyb.)

000036340

CONTENTS // Introduction... 5 // A survey of deposition techniques... 7 // Structure of DLC films... 12 // Optical properties of DLC films... 17 // Chemical properties of DLC films... 20 // Electrical properties... 22 // Mechanical properties ... 24 // Thermal conductivity of DLC films ... 27 // Plasma etching of DLC films... 28 // Special methods of preparation... 29 // Investigation of DLC films by special diagnostic methods... 31 // Proposed applications of DLC films ... 33 // Experiment... 35 // Results... 3 9 // The reflectivity measurements on DLC films... 49 // Photoelectronic properties ... 53 // An ellipsometric study of DLC films... 55 // Hardness testing of thin DLC films... 70 // Conclusion... 78

(OCoLC)27973926

cnb000070681