|
|
.
|
|
|
0 (hodnocen0 x )
|
|
|
EB
|
|
|
ONLINE
|
|
|
|
|
|
|
|
|
First edition
|
|
|
Oxford ; Boston : William Andrew Publishing, 2014
|
|
|
1 online resource (614 pages) : illustrations
|
| Externí odkaz |
 Plný text PDF
|
|
* Návod pro vzdálený přístup
|
|
|
|
|
|
|
|
|
|
ISBN 9780815519874 (electronic bk.)
|
|
|
ISBN 9780815515937 (hbk.)
|
|
|
Print version: Sarkar, Jaydeep. Sputtering materials for VLSI and thin film devices. Oxford : William Andrew Publishing, 2014 x, 603 pages : illustrations ; 24 cm. ISBN 9780815515937
|
|
|
Includes bibliographical references and index
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
001767859
|
|
|
full
|
|
|
(Au-PeEL)EBL1550523
|
|
|
(CaONFJC)MIL543246
|
|
|
(CaPaEBR)ebr10800153
|
|
|
(MiAaPQ)EBC1550523
|
|
|
(OCoLC)863203964
|
Dotazy a připomínky