Print version: International Conference on Materials for Advanced Technologies. NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore. Durnten-Zurich, Switzerland : Trans Tech Publications, [2011] 228 pages ; 25 cm. Advanced materials research ; volume 254 ISBN 9783037851456