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0 (hodnocen0 x )
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EB
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ONLINE
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Pfaffikon, Switzerland : TTP, 2014
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Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]
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1 online resource (331 pages) : illustrations
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 Plný text PDF
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* Návod pro vzdálený přístup
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ISBN 9783038266266 (electronic bk.)
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ISBN 9783038352426
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Solid State Phenomena, ISSN 1662-7799 ; Volume 219
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Print version: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium) Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium. Pfaffikon, Switzerland : TTP, c2014 333 pages Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219. ISBN 9783038352426
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Includes bibliographical references at the end of each chapters and index
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001785413
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full
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(Au-PeEL)EBL1910939
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(CaPaEBR)ebr10951269
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(MiAaPQ)EBC1910939
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(OCoLC)893677848
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Dotazy a připomínky