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0 (hodnocen0 x )
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EB
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ONLINE
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London : ISTE ; Hoboken, N.J. : Wiley, 2011
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1 online resource (xvii, 337 p.) : ill
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 Plný text PDF
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* Návod pro vzdálený přístup
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ISBN 9781118601112 (electronic bk.)
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ISBN 1848212313
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ISBN 9781848212312 (hc)
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Includes bibliographical references and index
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The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion..
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Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
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001755047
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full
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(Au-PeEL)EBL1124704
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(CaONFJC)MIL450003
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(CaPaEBR)ebr10660607
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(MiAaPQ)EBC1124704
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(OCoLC)828298716
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Dotazy a připomínky