.

0 (hodnocen0 x )

EB

ONLINE

London : ISTE ; Hoboken, N.J. : Wiley, 2011

1 online resource (xxv, 377 p.) : ill. (some col.)

ISBN 9781118621233 (electronic bk.)

ISBN 184821202X (hardback)

ISBN 9781848212022 (hardback)

Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier

Includes bibliographical references and index

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher..

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries

001756754

full

(Au-PeEL)EBL1143629

(CaONFJC)MIL462802

(CaPaEBR)ebr10671590

(MiAaPQ)EBC1143629

(OCoLC)830161630