Print version: Viloan, Rommel Paulo B. Engineered Ion-Bombardment As a Tool in Thin Film Deposition Linkoping : Linkopings Universitet,c2021
Intro -- Abstract -- Popularvetenskaplig sammanfattning -- Preface -- Included papers -- Contributions to the included papers -- Acknowledgements -- Contents -- 1. Introduction -- 2. Sputtering process -- 3. Thin film growth -- 4. Plasma characterization of ionic species -- 5. Material characterization -- 6. Summary and contribution to the field -- 7. Future outlook -- Bibiliography -- Papers.