Print version: Rouf, Polla Time-Resolved CVD of Group 13-Nitrides Linkoping : Linkopings Universitet,c2021
Intro -- Abstract -- Popularvetenskaplig Sammanfattning -- Preface -- Acknowledgement -- Papers Included in the Thesis and Contribution -- Papers not Included in the Thesis -- Table of Contents -- Chapter 1 - Introduction -- Chapter 2 - ALD -- Chapter 3 - Precursors -- Chapter 4 - Group 13-Nitrides -- Chapter 5 - Thin film Deposition of Group 13-Nitrides -- Chapter 6 - Substrates and Crystal Growth -- Chapter 7 - Characterisation -- Chapter 8 - Contribution to the Field -- Chapter 9 - Outlook -- References -- Papers.